PURPOSE: To actively compensate the change of the temperature distribution of a measured object by fitting a heat flux sensor. ;CONSTITUTION: Four thermoelectric elements (Peltier elements) 1 are electrically connected in series via electrodes 21, 22, and a board 31 is connected to a board 7 having known heat conductivity. Both end sections of the electrode 22 are connected to a DC power source 5. The thermoelectric elements 1 have different polarities respectively, heat absorption or heat generation occurs on both ends of the thermoelectric elements 1 when a current is fed from the DC power source 5, and the board 7 can be cooled or heated. A measured object is fitted to the lower face of the board 7, and the first temperature sensor 41 measuring the temperature of the surface of the measured object and the second temperature sensor 42 measuring the temperature at one point vertically above the first temperature sensor 41 against the surface of the measured object in the board 7 are installed. The temperature sensors 41, 42 are connected to a temperature measuring instrument 6 made of a thermistor and the like.;COPYRIGHT: (C)1993,JPO&Japio
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