首页> 外国专利> Measuring roughness and shape deviation of technical surfaces - using reflection principle and comparison of recorded intensity distribution with patterns obtained over optical paths with statistical evaluation

Measuring roughness and shape deviation of technical surfaces - using reflection principle and comparison of recorded intensity distribution with patterns obtained over optical paths with statistical evaluation

机译:测量工业表面的粗糙度和形状偏差-使用反射原理并比较记录的强度分布与通过光路获得的图案进行统计评估

摘要

The method involves making use of the reflection principle and the resulting intensity distributions. A light source (LQ) is directed towards the surface (TO) at a define angle (a). The resulting intensity distribution of reflected and scattered light is detected by one or more photosensitive receivers (FD) and recorded. The recorded values are processed (AE) and compared with intensity patterns obtained via one or more optical paths of different lengths. The position and/or degree of surface roughness and/or the average inclination angle of the rough parts are statistically evaluated. ADVANTAGE - Improved qualitative and quantitative detection of different degrees of roughness of surfaces in presence of surface shape errors.
机译:该方法涉及利用反射原理和所得的强度分布。光源(LQ)以限定的角度(a)指向表面(TO)。由一个或多个光敏接收器(FD)检测并记录所得的反射和散射光强度分布。处理记录的值(AE),并将其与通过一个或多个不同长度的光路获得的强度模式进行比较。统计地评估粗糙部分的表面粗糙度的位置和/或程度和/或平均倾斜角。优点-改进的定性和定量检测不同表面粗糙度的表面存在形状错误。

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