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Vapour deposition - has closed tunnels of magnetic field lines over molten material in crucible with electron beam guns for ionisation
Vapour deposition - has closed tunnels of magnetic field lines over molten material in crucible with electron beam guns for ionisation
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机译：气相沉积-用电子束枪将坩埚中熔融材料上方的磁场线封闭起来，以进行电离
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摘要
To apply an ion cladding to substrates or produce a reactive vaporisation of materials with a crucible and a magnetic field to ionise the vaporised material, the crucible walls form a pole shoe with the same polarity. A futher pole shoe is arranged in the crucible with opposing polarity, so that a closed tunnel of magnetic field lines can be set at the surface of the molten bath in the crucible. At least one linear vaporisation source is formed by a single electron beam gun or a group of guns to transmit electron beams at the surface of the molten material, to form a rectangle with side parallel to the crucible walls. A plasma is ignited within the closed tunnel of magnetic field lines, and the low magnetic electrons reflected from the plasmas are directed on cycloid paths. These electrons give a multiple ionisation of the vaporised material from the linear sources with a high deg. of ionisation. The crucible is pref. box shaped, with an open upper side in the vaporising direction. The crucible and its contents, are insulated electrically. The plasma can be intensified magnetically through a negative voltage potential at the crucible and its contents, and the plasma can also be intensified by the feed of an inert or reactive gas. The electron beam guns have conventional deflectors to give a band of electron beams. The electron guns are above the molten surface and outside a projected surface perpendicular over the crucible. USE/ADVANTAGE - The system is used in assemblies such as for vapour deposition of strip materials. The operation is a single stage action, to give a quality deposited layer on the substrate
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