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Continuous contact-free thickness measuring device for thin conductive films on an insulating substrate, such as a moving fibre or band
Continuous contact-free thickness measuring device for thin conductive films on an insulating substrate, such as a moving fibre or band
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机译:连续非接触式厚度测量装置,用于测量绝缘基板(如活动的纤维或带)上的导电薄膜
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摘要
Continuous, contact-free thickness measuring device for a thin conductive film on an insulating substrate, such as a moving fibre (6) or band, characterised in that it includes: … … - a microwave generator associated via coupling means with a resonant cavity comprising a metal wire in the form of a helix (10) fixed at its ends (11, 12) to two metal plates (13, 14), the said insulating support being capable of moving substantially along the axis (15) of the said helix (10), … - means for coupling the said cavity to a detection device (22, 23) of the transmission factor of the said cavity, which is a direct function of the said thickness, the said measurement being made at constant frequency. … …IMAGE…
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