首页> 外国专利> Ceramic membrane pressure sensor - has central membrane zone with stiffening region enclosed by inner strain zone and strengthening zone leading to frame section

Ceramic membrane pressure sensor - has central membrane zone with stiffening region enclosed by inner strain zone and strengthening zone leading to frame section

机译：陶瓷膜压力传感器-具有中央膜区域，其中央区域被内部应变区域和加强区域所包围，而加强区域通向框架部分

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摘要

A pressure sensor has a ceramic sensor element with a central zone in the form of a membrane with a plane top side. The outer zones form a frame for the membrane. The top side of the membrane carries piezoresistive thick film resistances (21, 22). The membrane (15) has at least one thickened stiffening region (16) enclosed by a thinner strain region (18) and a strengthening region (17) in which it increases uniformly in thickness from the strain region towards the frame (11). ADVANTAGE - Has high resistance to overpressure and produces large useful signal.

机译：压力传感器具有陶瓷传感器元件，该陶瓷传感器元件具有呈膜形式的中央区域，该中央区域具有平坦的顶侧。外部区域形成膜的框架。膜的顶部带有压阻厚膜电阻（21、22）。膜片（15）具有至少一个由较薄的应变区域（18）和增强区域（17）包围的增厚的加强区域（16），在该区域中，膜从应变区域向框架（11）的厚度均匀增加。优势-具有超强的抗过压能力，可产生大量有用的信号。

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公开/公告号DE4024780A1

专利类型
公开/公告日1991-10-17

原文格式PDF
申请/专利权人 ROBERT BOSCH GMBH 7000 STUTTGART DE;
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申请/专利号DE19904024780
发明设计人 HOEBEL ALBERT-ANDREAS DIPL.-ING.;HOLLAND MARTIN DIPL.-PHYS. 7400 TUEBINGEN DE;ZIEGENBEIN BOTHO DIPL.-PHYS. DR. 7410 REUTLINGEN DE;SOLLICH NORBERT DIPL.-PHYS. 7410 REUTLINGEN DE;
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申请日1990-08-04
分类号G01L9/04;
国家 DE
入库时间 2022-08-22 05:49:09

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