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PHOTOCAPACITANCE MEASURING EQUIPMENT BY CONSTANT CAPACITY METHOD AND MEASURING METHOD
PHOTOCAPACITANCE MEASURING EQUIPMENT BY CONSTANT CAPACITY METHOD AND MEASURING METHOD
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机译：恒容量法的光电容量测定装置及测定方法
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摘要
PURPOSE:To make a measurement of charge condition at an arbitray point possible wherein a charged condition of deep level changed by radiating a light is returned to an initial charged condition, by inverting a wavelength sweep direction at an arbitray measuring point, and applying a forward bias to a sample in a dark place when difference exsists between measured values before and after the inversion. CONSTITUTION:A light radiated from a light source 1 is divided into monochromatic light by a spectroscope 2, and the sample 5 is irradiated by the monochromatic light converged by an optical system 3. The junction capacity 6 of the sample 5 is measured by a capacitance meter 8, and an inverse bias voltage is applied by an inverse bias voltage control circuit 7. The junction capacity value obtained from the capacitance meter 8 is compared with a reference value in a comparator 10. The spectroscope 2 is driven by a wavelength sweeper, and the sweep direction can be inverted at an arbitrary measuring point by a wavelength sweep direction switch circuit 4. By this change-over, a forward bias voltage is applied to the sample from a forward bias voltage suppling circuit 9. The deep level in a semiconductor crystal can be accurately measured, thereby.
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