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Method for the scanning confocal light-optical microscopic and indepth examination of an extended field and devices for implementing said method

机译:扫描共聚焦光学显微镜和深度检查扩展场的方法以及实现该方法的设备

摘要

Method for the scanning confocal light-optical microscopic and in- depth examination of an extended field and devices for implementing said method. The method consists of forming a principal luminous beam made up of a plurality of secondary luminous beams distinguished from each other by means of at least one of their characteristics, directing the principal luminous beam towards focussing means (30), focussing onto an object to be examined by means of the focussing means (30) at points of different altitude the various secondary luminous beams, sending back the secondary luminous beams reflected by the object to be examined towards a detection system (20), detecting the intensity of the secondary beams, digitally analyzing and processing the signals detected, and of carrying out a scanning of the principal luminous beam as regards all of the object to be studied.PPApplication for microelectronics inspection.
机译:用于扫描扩展视野的共聚焦光学显微镜和深度检查的方法以及用于实现所述方法的设备。该方法包括形成主光束,该主光束由多个通过其至少一个特征彼此区分的次级光束组成,将主光束引向聚焦装置(30),聚焦到待聚焦的物体上。通过聚焦装置(30)在不同高度的点处检测各种次级光束,将被检查对象反射的次级光束向检测系统(20)发送回去,检测次级光束的强度,对检测到的信号进行数字分析和处理,并对所有要研究的对象进行主光束的扫描。

在微电子检查中的应用。

著录项

  • 公开/公告号US4965441A

    专利类型

  • 公开/公告日1990-10-23

    原文格式PDF

  • 申请/专利权人 COMMISSARIAT A LENERGIE ATOMIQUE;

    申请/专利号US19890302479

  • 发明设计人 BERNARD PICARD;

    申请日1989-02-26

  • 分类号G01J1/20;

  • 国家 US

  • 入库时间 2022-08-22 06:06:46

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