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Method of heat treatment amorphous soft magnetic film layers to reduce magnetic anisotropy
Method of heat treatment amorphous soft magnetic film layers to reduce magnetic anisotropy
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机译：热处理非晶态软磁膜层以减小磁各向异性的方法
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摘要
A method of heat treating an amorphous soft magnetic (ASM) film for use in a device that utilizes magnetism and is fabricated by depositing two or more layers of an ASM film, and an associated oxide film and conductive metal film, on a substrate. Typically, the substrate is made of an oxide. More specifically, the method involves: performing a heat treatment after each layer of the ASM film has been deposited, at a temperature lower than the crystallization temperature and the Curie point of the ASM film in a static magnetic filed applied either in a direction generally perpendicular to the direction in which a high magnetic permeability for high frequency is to be finally attained in the ASM film or in the principal direction in which the high permeability for high frequency is desired; performing a heat final treatment, after all of the layers of the ASM film have been deposited, at a temperature equal to or lower than the temperature for the previous heat treatment in a static magnetic field applied either in the principal direction or in a direction generally perpendicular thereto, the magnitude of the uniaxial magnetic anisotropy to be imparted to the ASM film being controlled by the temperature and duration of the final heat treatment.
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