首页>
外国专利>
Method of thermal isolation of detector elements in an uncooled staring focal plane array
Method of thermal isolation of detector elements in an uncooled staring focal plane array
展开▼
机译：未冷却凝视焦平面阵列中探测器元件的热隔离方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method of thermally isolating detector elements in an uncooled focal pl array. A backfill material of arsenic trisulfide is deposited inside reticulated grooves in a detector material to provide strength prior to the step of bump bonding the detector elements of the detector material to a readout device array. After the bump bonding step, an oxygen rich gas, such as a dry oxygen and nitrogen mixture, is flowed between the detector and readout arrays to remove the arsenic trisulfide material therefrom leaving an air gap between the detector elements.
展开▼
