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Probe devices having a single-feed carrier, a single feed carrier entry device, and a single feed carrier entry device
Probe devices having a single-feed carrier, a single feed carrier entry device, and a single feed carrier entry device
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机译：具有单饲料载体，单饲料载体进入装置和单饲料载体进入装置的探针装置
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摘要
PURPOSE:To eliminate the damage of a wafer at the time of conveying by providing a moving plate laterally removing to the waver containing position of a prober body, and detachably supporting a wafer receiving tray on the plate. CONSTITUTION:Side face guide rollers 8 are arranged between upper and lower guide rollers 6 and 7, and a moving plate 9 is so provided between the rollers 6 and 7 as to be laterally removed by a guide restricting operation by the rollers 8. A plurality of supporting pins 13 are stood at a predetermined interval on the upper surface of the plate 9, an engaging hole 15 having a tapered guide face is opened at a position corresponding to the pin 13 of the lower surface of a receiving tray 14 for placing a wafer 3, the tray 14 is effectively positioned on the plate 9 to be detachably supported by engaging the pin 13 with the hole 15.
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