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PROCESS FOR THE PRODUCTION OF THERMALLY STABLE LAYERS WIPROCESS FOR THE PRODUCTION OF THERMALLY STABLE LAYERS WITH A GREAT HARDNESS AND/OR LOW-FRICTION PROPERTIES TH A GREAT HARDNESS AND/OR LOW-FRICTION PROPERTIES
PROCESS FOR THE PRODUCTION OF THERMALLY STABLE LAYERS WIPROCESS FOR THE PRODUCTION OF THERMALLY STABLE LAYERS WITH A GREAT HARDNESS AND/OR LOW-FRICTION PROPERTIES TH A GREAT HARDNESS AND/OR LOW-FRICTION PROPERTIES
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机译：用于生产热稳定层的工艺用于生产具有大硬度和/或低摩擦特性的热稳定层的方法
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摘要
A process for the production of layers which have great hardness and/or low-friction properties, in particular based on micro- or nanodisperse carbide carbon layers, is proposed. A target material to which an electric potential is applied is converted in a vacuum into a target plasma. The target plasma reaches the substrate which is at an electric potential approximately equal to or higher than that of the target material and forms the desired layer on said substrate. The target material is formed by a titanium alloy, the titanium alloy being vaporised by means of an arc to give a titanium alloy plasma. The conversion of the titanium alloy into the plasma is carried out in the gas phase of ionised carbon. The process is operated by a method in which titanium alloy carbide, gaseous titanium alloy and carbon are formed, the carbide of the titanium alloy, the titanium alloy and carbon being formed, in succession on the substrate, as a ternary layer which additionally has thermal stability.
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