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SUSCEPTOR AND SUSCEPTOR DEVICE, AND WAFER DELIVERY METHOD FROM SUSCEPTOR
SUSCEPTOR AND SUSCEPTOR DEVICE, AND WAFER DELIVERY METHOD FROM SUSCEPTOR
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机译：上位机和上位机以及上位机的晶圆传送方法
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摘要
PURPOSE:To make uniform the quantity of heat received by a wafer by forming a supporting piece for lifting the wafer of a material of the same quality as that of a susceptor, and forming the shape which is useable as part of an outer peripheral wall. CONSTITUTION:A susceptor 11 includes a lifting/supporting piece 13 provided freely to be fitted onto a counterbore 11a. The lifting/supporting piece 13 has the same material quality as that of the susceptor 11 and is adapted to uniformly apply heat to a wafer W on a seat 11b of the susceptor 11. An attraction port 14a of an attraction jig 14 is brought into contact with a lifting portion 13 of the lifting/supporting piece for attraction of the latter and the attraction jig 14 is moved upwardly to float the wafer W. Attraction type conveyance means 15 is inserted into a gap (d) between the wafer W and the susceptor 11 to attract and convey the rear of the wafer W.
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