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Phase modulated ronchi testing of aspheric surfaces

机译:非球面的相位调制ronchi测试

摘要

An apparatus and method for measuring the surface contour of an aspheric optical surface 36. This is accomplished by splitting a single coherent beam of light into two individual beams with one beam tilted with respect to the other. The degree of tilt is adjusted until a single interference fringe is observed. This single fringe is then directed onto the aspheric surface 36 under test by means of a focusing lens 30. By the use of a beam spliter 24 the reflected fringe is then directed onto a multi-element optical detector 40 . The shape of the fringe reflected onto the detector 40 corresponds to the shape of the aspheric surface 36. A phase modulating mirror 26 is then moved to increase or decrease the path length of one of the two interfering beams of light. This results in sweeping the fringe across the entire aspheric surface 36 so that the entire aspheric surface 36 can be measured. The result is an easy to perform measurement of the aspheric surface 36 which is close to diffraction limited. Further, the above invention does not require a laboratory environment.
机译:一种用于测量非球面光学表面36的表面轮廓的装置和方法。这是通过将单个相干光束分成两个单独的光束而一个光束相对于另一个光束倾斜来实现的。调整倾斜度,直到观察到单个干涉条纹为止。然后,该单个条纹通过聚焦透镜30被引导到被测非球面36上。通过使用分束器24,反射条纹被引导到多元件光学检测器40上。反射到检测器40上的条纹的形状对应于非球面36的形状。然后移动相位调制镜26以增加或减小两个干涉光束之一的路径长度。这导致将条纹扫过整个非球面36,从而可以测量整个非球面36。结果是易于进行接近衍射极限的非球面36的测量。此外,以上发明不需要实验室环境。

著录项

  • 公开/公告号US4818108A

    专利类型

  • 公开/公告日1989-04-04

    原文格式PDF

  • 申请/专利权人 HUGHES OPTICAL PRODUCTS INC.;

    申请/专利号US19870132225

  • 发明设计人 HANS J. EPPINGER;

    申请日1987-12-14

  • 分类号G01B9/02;

  • 国家 US

  • 入库时间 2022-08-22 06:28:19

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