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Method and apparatus for treating chemically of the pieces by a gaseous phase produced by a separation by means of a laser beam.

机译:通过气相分离产生的气相化学处理碎片的方法和设备。

摘要

P the present invention relates to a process and apparatus for treating chemically of the pieces by a gaseous phase produced by a separation by means of a laser. / p & & p & this process consists in exposing, in a chambre12, the piece has traiter13 27 has a gaseous atmosphere containing a component to be separated by a radius laser25 in order to produce a substance for react with one of the surfaces of the piece13, for the chemical treatment of that - ci. It is selected, the wave length of the radius laser25 so as to break the connection desired in order to obtain only the reactant desire without producing undesirable under - products that could interfere with the desired chemical reaction). / p & & p & the invention applies in particular for the treatment of the plates and the conductive state - decapage of metals. / p
机译:本发明涉及一种通过激光分离产生的气相化学处理碎片的方法和设备。 & &此过程包括在chambre12中暴露具有traiter13的部件,该部件具有气态气氛,其中包含要通过半径激光器25分离的成分的气态气氛,以便产生一种与部件13的一个表面反应的物质,以进行化学处理。其中的-ci。选择半径激光器25的波长以便断开所需的连接,以便仅获得所需的反应物而不产生可能干扰所需化学反应的不良副产物。 & &本发明尤其适用于板的处理和金属的导电状态-剥落。

著录项

  • 公开/公告号FR2456145B1

    专利类型

  • 公开/公告日1985-03-22

    原文格式PDF

  • 申请/专利权人 PERKIN ELMER CORP;

    申请/专利号FR19800009966

  • 发明设计人

    申请日1980-05-05

  • 分类号C23F1/02;B23K26/14;G03F1/00;H01L21/268;H01L21/306;

  • 国家 FR

  • 入库时间 2022-08-22 07:56:24

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