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Process for the removal of boron from silicon by zone-melting with a reactive plasma
Process for the removal of boron from silicon by zone-melting with a reactive plasma
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机译:通过反应性等离子体区域熔化从硅中去除硼的方法
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摘要
purification of silicon by zone melting and removing boron.it is the amalgamation of area of a silicon ingot of a leader in the area of hot plasma produced by high frequency excitation.the plasma is c
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