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ETCHING SPEED DECIDING DEVICE

机译:加快速度的决定装置

摘要

PURPOSE:To remove a noise due to an irregular flow of a liquid, by leading an output of a potential detecting part into a low-pass filter which is capable of changing a cut-off frequency by a Fourier converter. CONSTITUTION:To a sample metallic piece 1 of an etching speed measuring cell 4 provided with the sample metallic piece 1 operating as a working electrode, a reference electrode 2 and an opposed electrode 3, charge of a capacitor 5 is supplied through the opposed electrode 3, and a variation of the polarized potential of the sample metallic piece 1 is detected by making the reference electrode a reference. This detecting signal is sent from a buffer amplifier 12 to a filter device 13 for attenuating a noise of a specific frequency component from the polarized potential, and a high speed Fourier converter 14, its noise component is removed, and a potential difference signal is recorded in a recorder 8. As for this filter device 13, a low-pass filter of 60Hz or below is effective against an induced noise from a commercial electric power source, but against a noise due to an irregular flow of a liquid, a cut-off frequency which exerts no influence on information of a polarized value is set by the high speed Fourier converter.
机译:目的:通过将电势检测部件的输出引入低通滤波器来消除由于液体不规则流动引起的噪声,该低通滤波器能够通过傅立叶转换器改变截止频率。组成:向一个蚀刻速度测量单元4的金属样品1,该金属样品1设有作为工作电极的金属样品1,参考电极2和相对电极3,电容器5的电荷通过相对电极3提供然后,通过将参比电极作为参比,检测出样品金属片1的极化电位的变化。将该检测信号从缓冲放大器12发送到滤波器装置13,以从极化电势中衰减特定频率分量的噪声,并且高速傅里叶转换器14将其噪声分量去除,并记录电势差信号。在记录器8中。对于该滤波器装置13,60Hz或以下的低通滤波器对于来自商业电源的感应噪声是有效的,但是对于由于液体的不规则流动而产生的噪声是有效的。高速傅里叶转换器设定对极化值的信息没有影响的截止频率。

著录项

  • 公开/公告号JPS57158541A

    专利类型

  • 公开/公告日1982-09-30

    原文格式PDF

  • 申请/专利权人 TOKYO SHIBAURA DENKI KK;

    申请/专利号JP19810043693

  • 申请日1981-03-25

  • 分类号G01N27/26;G01N17/00;G01N17/02;

  • 国家 JP

  • 入库时间 2022-08-22 14:22:21

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