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Semiconducting highly antimony doped silicon prodn. - by doping melt with antimony alloy to reduce antimony vapour pressure and drawing
Semiconducting highly antimony doped silicon prodn. - by doping melt with antimony alloy to reduce antimony vapour pressure and drawing
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机译:半导体高锑掺杂硅产品。 -通过在熔融物中掺入锑合金来降低锑蒸气压并拉丝
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摘要
Prodn. of semiconducting, highly Sb-doped Si (I) entails first producing a metallic alloy (II) contg. Sb, then fusing this with Si in a crucible and drawing a highly doped Si rod or bar from this. Pref. (II) is an alloy of Sb (1 wt.pt.) with Au (4 pts.), Sn (3 pts.) or Si (5 pts.). In (sic.; Sb) is incorporated in a concn. of ca. 10 esp. 19 or 10 exp. 20 Sb atoms/cm3. Ar under slight over-pressure is used as protective gas. (I) is specified for making opto-electronic devices and IR sensors. The use of (II) as dopant greatly reduces the Sb vapour pressure and hence considerably increases the possible Sb concn.
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