首页> 外国专利> Quantitative topographical evaluation of electron microscope images - uses reference structure of know geometry and dimensions placed upon sample

Quantitative topographical evaluation of electron microscope images - uses reference structure of know geometry and dimensions placed upon sample

机译:电子显微镜图像的定量地形评估-使用已知几何结构和尺寸的参考结构放置在样品上

摘要

A method of quantitative topographical evaluation by use of raster electron microscope images is partic. applicable to analysis and process control of electronic circuits. A reference test structure with edges inclined at a known angle is placed on top of the sample to be evaluated. The projections of the test structure inclined edges on the sample are known in the x and y coordinate directions. The corresp. values are measured in the image plane. From a knowledge of the sample inclination and the measurement amplification the measurements are evaluated to give the sample height and edge inclination.
机译:使用栅格电子显微镜图像进行定量地形评估的方法是特别的。适用于电子电路的分析和过程控制。将边缘倾斜已知角度的参考测试结构放置在要评估的样品上方。沿x和y坐标方向已知测试结构倾斜边缘在样品上的投影。相应的。值在像平面中测量。通过了解样品的倾斜度和测量放大率,可以对测量值进行评估,以得出样品的高度和边缘倾斜度。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号