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Quantitative topographical evaluation of electron microscope images - uses reference structure of know geometry and dimensions placed upon sample
Quantitative topographical evaluation of electron microscope images - uses reference structure of know geometry and dimensions placed upon sample
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机译:电子显微镜图像的定量地形评估-使用已知几何结构和尺寸的参考结构放置在样品上
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摘要
A method of quantitative topographical evaluation by use of raster electron microscope images is partic. applicable to analysis and process control of electronic circuits. A reference test structure with edges inclined at a known angle is placed on top of the sample to be evaluated. The projections of the test structure inclined edges on the sample are known in the x and y coordinate directions. The corresp. values are measured in the image plane. From a knowledge of the sample inclination and the measurement amplification the measurements are evaluated to give the sample height and edge inclination.
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