A method for etching a substrate surface of lithium niobate

• 1. 半导体基板的表面蚀刻装置、以及使用该表面蚀刻装置制造在表面形成有凹凸形状的半导体基板的方法 [P] . 中国专利： CN103140918A . 2013-06-05
• 2. 用于有选择地蚀刻基板表面的基板处理装置和方法 [P] . 中国专利： CN101615572A . 2009-12-30
• 3. LITHIUM NIOBATE SUBSTRATE, PRODUCTION METHOD THEREOFR, AND METHOD FOR TREATING SURFACE OF LITHIUM NIOBATE SUBSTRATE [P] . 日本专利： JP2005281113A . 2005-10-13

  机译： 铌酸锂基体，其制备方法和处理铌酸锂基体的方法

• 4. A method for etching a substrate surface of lithium niobate [P] . 德国专利： DE2605582B2 . 1979-04-19

  机译： 一种蚀刻铌酸锂基板表面的方法

• 5. A method for etching a substrate surface of lithium niobate [P] . 德国专利： DE2605582A1 . 1976-08-26

  机译： 一种蚀刻铌酸锂基板表面的方法

• 1. Dislocation of Cz-sapphire substrate for GaN growth by chemical etching method [J] . 牛新环, 卢国起, 张维连, 中国有色金属学会会刊：英文版 . 2006,第B01期
• 2. Method of surface treatment on sapphire substrate [J] . 牛新环, 刘玉岭, 檀柏梅, 中国有色金属学会会刊：英文版 . 2006,第B02期
• 3. A parametric study of ICP-RIE etching on a lithium niobate substrate [C] . Chun-Ming Chang, Yu Chih-Sheng, Fan-Chun Hsieh, IEEE International Conference on Nano/Micro Engineered and Molecular Systems . 2015
• 4. Raman scattering from lithium-niobate and laser recrystallization of polysilicon on a lithium-niobate substrate [D] . Chen, San Ming 1987
• 5. Decontaminating surfaces with atomized disinfectants generated by a novel thickness-mode lithium niobate device [O] . Monika Kumaraswamy, Sean Collignon, Carter Do, -1
• 6. First investigations on stoichiometric lithium niobate as piezoelectric substrate for high-temperature surface acoustic waves applications [O] . Aubert, Thierry, Kokanyan, Ninel, Alhousseini, Hassan, 2017
• 7. Lithium Niobate Reactive Ion Etching [R] . Winnall, S. , Winderbaum, S. 2000

• 1. Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbOsub3/sub) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software [J] . Ahmad M. Alsaad ,Ahmad A. Ahmad ,Qais M. Al-Bataineh . 应用科学（英文） . 2019,第4期
• 2. Flow-restricted Etching Method on Isotropic Substrates and Its Mechanism [J] . XIE Haibo ,ZHENG Yi ,FAN Yurun . 中国机械工程学报 . 2010,第005期
• 3. Flow-restricted Etching Method on Isotropic Substrates and Its Mechanism [J] . XIE Haibo ,ZHENG Yi ,FAN Yurun . 中国机械工程学报 . 2010,第005期
• 4. 铌酸锂（ＬＮ）单晶基板的表面缺陷研究 [C] . 徐润源 . 第六届全国固体缺陷会议 . 1994
• 5. 一种陶瓷材料表面/亚表面损伤表征方法及其在磨削损伤检测中的应用 [A] . 鲍雨梅 . 2009