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MAKING METHOD OF ILLUMINANCE DISTRIBUTION CORRECTING FILTER OF FOCUSING OPTICAL TRANSMISSION BODY ARRAY
MAKING METHOD OF ILLUMINANCE DISTRIBUTION CORRECTING FILTER OF FOCUSING OPTICAL TRANSMISSION BODY ARRAY
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机译：聚焦光学传输机构阵列的照度分布校正滤波器的制作方法
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摘要
PURPOSE:To make the filter with good accuracy by vaccum-evaporating thin film materials through a mask which has a thickness 1/5 to 5 times the diameter of focusing optical transmission bodies and has window holes formed in correspondence to the arraying pitch thereof. CONSTITUTION:A mask 10 has a thickness 1/5 to 5 times the diameter of focusing optical transmission bodies 2n and has window holes 11 of the same number as that of one row of optical transmission bodies arrayed in the longitudinal direction of a focusing optical transmission body array 1. The mask 10 is disposed to a filter substrate 12, which is then mounted in a vacuum evaporation apparatus. This film materials 13 such as Al, Cr, Ni, etc. are evaporated on the filter substrate 12 through the wsindow holes 11 of the mask 10. At this time, the vapors interfered by the circumferential walls of the window holes 11 become dense in the central part of the holes and coarse in the side part and cohere on the filter substrate 12 past the window holes 11. Thereby, the light absorbing films which are thick in the central part of the window holes 11 and become thinner as they go toward the side parts are formed.
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