首页> 外国专利> A process for the preparation of a dielectric layer on a bi geo, deep 12 to a depth of 20 - substrate

A process for the preparation of a dielectric layer on a bi geo, deep 12 to a depth of 20 - substrate

机译:在深12到深20的双地理层上制备介电层的方法-基板

摘要

A thin (less than 500 mu m) epitaxial dielectric layer having low photoconductivity is grown on a monocrystalline wafer composed of Bi12GeO20 by a liquid-phase epitaxial growth technique. The composition of the liquid melt from which the dielectric layer is grown is composed of a pseudo-three-component system defined by the formula: (Bi2O3)x(GeO2)x(Y+xGa2O3) wherein Y is a component selected from the group consisting of CaO, MgO, BaO, SrO and mixtures thereof and x is a numeral ranging from 0.05 to 5.0. The pseudo-three-component system is so-selected that in a ternary diagram of the three individual components, the mol ratio of Bi2O3:GeO2(Y+xGa2O3) is surrounded by a range connecting points A, B and C on such ternary diagram wherein point A is 0.760:0.002:0.238; point B is 0.994:0.002:0.004; and point C is 0.760:0.236:0.004.
机译:通过液相外延生长技术,在由Bi12GeO20构成的单晶晶片上生长具有低光电导率的薄的(小于500μm)外延电介质层。用于生长介电层的液体熔体的成分由下式定义的准三组分系统组成:(Bi2O3)x(GeO2)x(Y + xGa2O3)其中,Y是选自以下组的组分:由CaO,MgO,BaO,SrO及其混合物组成,x为0.05到5.0的数字。选择伪三组分系统,使得在三个单独组分的三元图中,Bi2O3:GeO2(Y + xGa2O3)的摩尔比被该三元图中的连接点A,B和C包围其中点A为0.760:0.002:0.238;点B为0.994:0.002:0.004; C点为0.760:0.236:0.004。

著录项

  • 公开/公告号DE2753787A1

    专利类型

  • 公开/公告日1978-06-15

    原文格式PDF

  • 申请/专利权人 SONY CORP;

    申请/专利号DE19772753787

  • 发明设计人 TAMURA HIDEMASA JP;OKAMOTO TSUTOMU JP;

    申请日1977-12-02

  • 分类号H01L21/316;

  • 国家 DE

  • 入库时间 2022-08-22 21:54:47

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