首页> 外国专利> Surface displacement or oscillation measurement - uses local interference between two scattered correlated point fields to permit larger stimulated oscillation amplitudes

Surface displacement or oscillation measurement - uses local interference between two scattered correlated point fields to permit larger stimulated oscillation amplitudes

机译:表面位移或振荡测量-利用两个分散的相关点场之间的局部干扰来允许更大的受激振荡幅度

摘要

The method measures surface vibrations in the direction normal to the surface using local interference between two correlated point fields produced by scattering light from the surface. It enables unpolished surfaces to be measured and to be stimulated to larger oscillation amplitudes perpendicular to the normal. The average intensity is measured in a region of interference contg. a large number of speckle grains. The two fields are simultaneously produced by two coherent beams incident on the surface at a slightly different angle, and are observed at a slightly different angle dependent on the two angles of incidence.
机译:该方法使用两个相关点场之间的局部干涉来测量垂直于表面方向的表面振动,其中两个相关点场是通过从表面散射光产生的。它可以测量未抛光的表面并将其激发到垂直于法线的更大的振动幅度。在干扰持续区域内测量平均强度。大量的斑点颗粒。这两个场是由两个相干光束以略微不同的角度入射到表面上同时产生的,并且以取决于两个入射角的稍稍不同的角度观察到。

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