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Structure investigation by optical correlation - using monochromatic light passed through correlator system with two optical lenses, filter and measuring diaphragm
Structure investigation by optical correlation - using monochromatic light passed through correlator system with two optical lenses, filter and measuring diaphragm
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机译：通过光学相关进行结构研究-使用单色光通过带有两个光学透镜，滤光片和测量光阑的相关器系统
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摘要
A method for testing structures uses the principle of optical filtering. Monochromatic light is passed through a micro lens and microdiaphragm and condenser to a partially transparent structure and thence to a photoelectric receiver through a correlator system with two optical lenses and measuring diaphragm. The photoelectric receiver measures by spatial integration. The surface to be measured is twice as great as the smallest detail of the structure to be inspected. The system permits high sensitivity and reproducibility using optical and photoelectric components of moderate quality.
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