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Electrically asymmetrically conductive systems with at least one p-n junction and methods of producing such systems

机译:具有至少一个p-n结的非对称导电系统及其制造方法

摘要

861,196. Semi-conductor devices. LICENTIA PATENT.VERWALTUNGS-G.m.b.H. June 7, 1957 [June 7, 1956], No. 18185/57. Drawings to Specification. Class 37. An electrical asymmetrically conductive system comprises a single-crystal semi-conductor body which consists of germanium, silicon, or of a semi-conductive intermetallic compound (i.e. a compound of two elements, one being boron, aluminium, gallium or indium, and the other being nitrogen, phosphorus, arsenic or antimony), and one part of which has P-type and its other part N-type conductivity, both parts forming, where they merge together, a PN junction, and the gradient of the concentration of the impurity centres in a direction perpendicular to the PN junction being flatter in that zone of the junction which is adjacent the line of intersection between the PN junction, and the external surface of the semi-conductor body than in the central part of the junction. The radial extent of the outer zone of the junction with flatter gradient can be small compared with the radial extent of the central part of the junction. In one method a semiconductor body with a PN junction which has a flat and over its whole extent substantially equal gradient of concentration of the impurity centres in a direction perpendicular to the PN junction is subjected to a treatment which increases the gradient in the central region of the PN junction. The treatment can be carried out by alloying on a substance, e.g. indium or antimony in the case of a germanium body or gold (with 5% antimony) or aluminium in the case of a silicon body, which contains or consists of impurity centres which do not cause any change in the conductivity type in the part of the semi-conductor body which extends between the portion of the surface of the semiconductor body to which the substance is applied and the PN junction, and driving the alloying process so deep into the semi-conductor body that it reduces the depth of the PN junction in the central region. The semi-conductor body having a flat gradient before treatment can be obtained by drawing from the melt by means of a seed crystal, and adding to the melt substance producing impurity centres of both types, e.g. gallium and arsenic or indium, and antimony or arsenic and antimony in the case of germanium, the substances differing from one another as regards their coefficients of precipitation in such a manner that there is a rate of growth at which impurity centres forming substances of both types are incorporated in the resulting crystal in equally effective amounts, whereas, on deviation from this rate of growth, one or the other type of impurity centre is preferentially incorporated, according to the sense of the deviation. Alternatively the semi-conductor body having a flat gradient before treatment is obtained by incorporating impurity centres producing substances which change the conductivity type by means of diffusion into a semiconductor body which at first has uniform conductivity type. In the case of a germanium body lithium, and in the case of a silicon body lithium or boron (from a boric iodide atmosphere) can be used with after-etching. Two different impurity centres forming substances can be used which produce the same conductivity type but have a slight difference in the rates of diffusion, or two different impurity centres producing substances which have at least substantially the same rate of diffusion but produce a different conductivity type are incorporated in such proportions that the amount of the substance which alters the conductivity type of the semi-conductor body is greater than the amount of the substance which has the same conductivity type as the semi-conductor body. In another method of preparing the system a semi-conductor body with a PN junction which has a steep, and over its whole extent substantially equal gradient of concentration of the impurity centres in a direction perpendicular to the PN junction is subjected to a treatment which flattens the gradient in that zone of the junction which is adjacent the line of intersection between the PN junction and the external surface of the body. The treatment can be carried out by applying an impurity centres forming substance, e.g. thallium or antimony, to the semi-conductor body, e.g. germanium-indium, adjacent to the line of intersection between the PN junction, and the external surface of the body, and causing the substance to diffuse into the body so as to increase the depth of the junction in its marginal zone. The semi-conductor body with an even steep gradient before treatment can be obtained by alloying a substance on to a semi-conductor body, e.g. germanium, which at first has uniform conductivity, the substance containing impurity centres or consisting of impurity centres, e.g. indium, which alter the conductivity type of the body.
机译:861,196。半导体器件。 LICENTIA PATENT.VERWALTUNGS-G.m.b.H。 1957年6月7日[1956年6月7日],编号18185/57。图纸按规格。第37类。一种非对称导电系统,包括单晶半导体主体,该主体由锗,硅或半金属间化合物(即硼,铝,镓或铟中的两种元素组成的化合物,另一部分为氮,磷,砷或锑),其中一部分具有P型导电性,另一部分具有N型导电性,这两个部分合并形成一个PN结,并在此处合并在一起,并且浓度梯度在与PN结和半导体本体的外表面相邻的结的区域中,在垂直于PN结的方向上的杂质中心比在结的中心部分中更平坦。 。与接合处的中央部分的径向范围相比,具有平坦梯度的接合点的外部区域的径向范围可以较小。在一种方法中,对具有PN结的半导体本体进行处理,该PN结具有平坦的并且在整个范围内在垂直于PN结的方向上杂质中心的浓度的梯度基本相等,该梯度增加了中心区域的梯度。 PN结。该处理可以通过在一种物质上合金化来进行,例如一种或多种。如果是锗体,则为铟或锑;如果是硅体,则为金(含5%锑)或铝;硅中含有杂质中心或由杂质中心组成,这些杂质中心不会使导电部分的导电类型发生任何变化。半导体本体在半导体本体的表面上与PN结接触的部分之间延伸,并推动合金化过程深入半导体本体,从而减小了PN结的深度。中部地区。处理前具有平坦梯度的半导体本体可以通过以下方式获得:通过使用晶种从熔体中拉出,并向熔体中添加产生两种杂质中心的两种类型的杂质中心,例如:镓,砷或铟,以及锗(锑或砷和锑),这些物质的沉淀系数互不相同,以一定的速度增长,杂质中心形成两种物质杂质以相同的有效量掺入到所得晶体中,而当偏离该生长速率时,根据偏离的意义优先掺入一种或另一种杂质中心。可替代地,通过将​​产生通过扩散扩散而改变导电类型的物质的杂质中心引入到首先具有均匀导电类型的半导体主体中,来获得在处理之前具有平坦梯度的半导体主体。在锗体锂的情况下,以及在硅体锂的情况下,锂或硼(来自碘化硼气氛)可以与后蚀刻一起使用。可以使用产生相同导电类型但扩散速率略有不同的两种不同的杂质中心形成物质,或者使用产生至少具有基本相同的扩散速率但产生不同导电类型的两种不同杂质中心形成物质。以这样的比例掺入,使得改变半导体本体的导电类型的物质的量大于具有与半导体本体相同的导电类型的物质的量。在制备该系统的另一种方法中,对具有PN结的半导体本体进行处理,该PN结在垂直于PN结的方向上具有陡峭且在其整个范围内杂质中心的浓度梯度基本相等。在与PN结和物体外表面之间的相交线相邻的结的区域中的梯度。该处理可以通过施加形成杂质中心的物质,例如杂质来进行。 or或锑到半导体主体,例如锗-铟,与PN结和物体外表面之间的交点相邻,并导致该物质扩散到体内,从而增加了其边缘区域中结的深度。可以通过将物质合金化到半导体本体上来获得在处理之前具有均匀陡峭梯度的半导体本体。首先具有均匀导电性的锗,该物质包含杂质中心或由杂质中心组成,例如,铟,会改变人体的导电类型。

著录项

  • 公开/公告号GB861196A

    专利类型

  • 公开/公告日1961-02-15

    原文格式PDF

  • 申请/专利权人 LICENTIA PATENT-VERWALTUNGS-G.M.B.H.;

    申请/专利号GB19570018185

  • 发明设计人

    申请日1957-06-07

  • 分类号C30B15/20;C30B31/18;H01L21/00;H01L21/228;H01L21/24;H01L29/00;H01L29/36;

  • 国家 GB

  • 入库时间 2022-08-23 18:22:38

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