首页> 外国专利> EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

机译:极端紫外线发光装置,极端紫外线发光方法和电子设备制造方法

摘要

An extreme ultraviolet light generating apparatus for generating extreme ultraviolet light in a chamber according to one aspect of the present disclosure includes a piezoelectric element provided in the chamber; a pressure sensor configured to detect pressure in the chamber; a gas introducing unit configured to introduce gas into the chamber; an exhaust unit configured to exhaust the gas from the chamber; and a control unit configured to control application of a voltage to the piezoelectric element. The control unit is configured to determine whether or not to apply a voltage to the piezoelectric element based on information on the pressure in the chamber obtained by the pressure sensor.
机译:根据本公开的一个方面的用于在腔室中产生极端紫外光的极端紫外光发光装置包括设置在腔室中的压电元件;压力传感器,被配置为检测腔室中的压力;一种气体引入单元,配置为将气体引入腔室;排气单元,被配置为将气体从腔室排出;和控制单元,被配置为控制向压电元件施加电压。控制单元被配置为基于由压力传感器获得的腔室中的压力的​​信息来确定是否向压电元件施加电压。

著录项

  • 公开/公告号US2021072646A1

    专利类型

  • 公开/公告日2021-03-11

    原文格式PDF

  • 申请/专利权人 GIGAPHOTON INC.;

    申请/专利号US202017089289

  • 发明设计人 KENGO HAYASHI;

    申请日2020-11-04

  • 分类号G03F7/20;H05G2;

  • 国家 US

  • 入库时间 2022-08-24 17:38:31

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