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Piezo actuators for optical beam steering applications

机译：用于光束转向应用的压电致动器

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摘要

Disclosed herein are maskless imaging tools and display systems that include piezoelectrically actuated mirrors and methods of forming such devices. The maskless imaging tool may include a light source. Additionally, the tool may include one or more piezoelectrically actuated mirrors for receiving light from the light source. The piezoelectrically actuated mirrors are actuatable about one or more axes to reflect the light from the light source to a workpiece positioned to receive light from the piezoelectrically actuated mirror. Disclosed herein is a maskless imaging tool that is a laser direct imaging lithography (LDIL) tool. The maskless imaging tool may also be a via-drill tool. Disclosed herein is also a piezoelectrically actuated mirror used in a projection system. For example, the projection system may be integrated into a pair of glasses.

机译：本文公开了掩模成像工具和显示系统，包括压电致动反射镜和形成这种装置的方法。掩模成像工具可以包括光源。另外，该工具可以包括一个或多个压电致动镜，用于从光源接收光。压电致动反射镜可致动围绕一个或多个轴来将来自光源的光反射到定位以从压电致动镜子接收光的工件。本文公开了一种掩模成像工具，其是激光直接成像光刻（LDIL）工具。无掩模成像工具也可以是通钻工具。本文公开了一种在投影系统中使用的压电致动镜。例如，投影系统可以集成到一对眼镜中。

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公开/公告号US10969576B2

专利类型
公开/公告日2021-04-06

原文格式PDF
申请/专利权人 INTEL CORPORATION;
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申请/专利号US201616072164
发明设计人 ALEKSANDAR ALEKSOV;FERAS EID;SASHA N. OSTER;SHAWNA M. LIFF;JOHANNA M. SWAN;THOMAS L. SOUNART;BARIS BICEN;VALLURI R. RAO;
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申请日2016-04-01
分类号G02B26/10;G02B26/08;G02B1/14;
国家 US
入库时间 2022-08-24 18:04:55

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