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PROCEDURES FOR THE FORMATION OF STARTED SCHOOLS AND ASSOCIATED BUILDINGS

机译:组建开始学校和相关建筑的程序

摘要

A process involves etching a semiconductor substrate to form a ditch, where the semiconductor substrate has a side wall facing the ditch, and separating a first semiconductor layer extending into the ditches. The first semiconductor layer has a first floor part on a bottom of the ditch and a first side wall part on the side wall of the semiconductor substrate. The first side wall is removed to reveal the side wall of the semiconductor substrate. The procedure also includes the separation of a second semiconductor layer extending into the ditches,where the second semiconductor layer has a second floor part above the first floor part and a second side wall that contacts the side wall of the semiconductor substrate. The second side wall is removed to reveal the side wall of the semiconductor substrate.
机译:一种过程涉及蚀刻半导体衬底以形成沟渠,其中半导体衬底具有面向沟渠的侧壁,并将延伸到沟槽中的第一半导体层分离。第一半导体层在沟槽的底部和半导体衬底的侧壁上具有第一楼层部分。移除第一侧壁以露出半导体衬底的侧壁。该方法还包括将延伸到沟槽中的第二半导体层的分离,其中第二半导体层具有在第一楼层部分上方的第二地板部分和第二侧壁接触半导体衬底的侧壁。去除第二侧壁以露出半导体衬底的侧壁。

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