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Systems and methods for compensating for nonlinear response characteristics with phase shift deflection measurements
Systems and methods for compensating for nonlinear response characteristics with phase shift deflection measurements
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机译：用于补偿具有相移偏转测量的非线性响应特性的系统和方法
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摘要
The present invention relates to a system and a method for compensating for non-linear response characteristics in object shape measurement using a phase shift deflection measurement method. More specifically, it is a method for compensating the non-linear response characteristic by the phase shift deflection measurement method, in which a pattern is generated by a pattern generator and projected onto a measurement object, and a detector reflects the non-linear response characteristic from the measurement object. The step of acquiring the image of the deformation pattern to be performed, the step of linearizing the non-linear response based on the lookup table considering the non-linear response characteristics of the pattern generating portion and the detector by the compensating means, and the compensating means. The present invention relates to a method for compensating a non-linear response characteristic in an object shape measurement using a phase shift deflection measurement method, which comprises a step of compensating for a phase shift amount generated in the non-linear response characteristic. [Selection diagram] Fig. 1
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