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POINT SCAN TYPE IMAGING APPARATUS FOR IMAGING TARGET OBJECT WITHIN MEDIA WITCH BRING ABOUT ABERRATION
POINT SCAN TYPE IMAGING APPARATUS FOR IMAGING TARGET OBJECT WITHIN MEDIA WITCH BRING ABOUT ABERRATION
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机译:点扫描型成像装置,用于媒体女巫内的成像目标对象带来差距
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摘要
The present invention relates to an imaging apparatus of a focus scan method for imaging a target object in a sample causing aberration, and a light source unit for irradiating a beam, and a beam irradiated from the light source unit is divided into a sample wave and a reference wave, and the sample wave is An optical interferometer that forms an interference wave between the reflected wave reflected from the sample and the reference wave, a camera module that photographs the interference wave, and is disposed on the optical path of the sample wave of the optical interferometer, the sample wave A scanning mirror reflecting the sample wave to scan a sample, a wavefront shape modulator disposed on the optical path of the sample wave of the optical interferometer, and a phase map calculation for calculating an aberration correction phase map for correcting sample-induced aberration A mode, and an imaging control unit operating in an imaging mode for imaging the target object in a state in which the aberration correction phase map is displayed on the wavefront shape modulator and the sample-causing aberration is corrected; The imaging control unit may control the wavefront shape modulator to operate as a mirror in the phase map calculation mode, and calculate the aberration correction phase map based on a CLASS algorithm.
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