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REQUIRED FIRE GATE ELECTRODS FOR SHORT-TERM, HALF-TERM AND GATE STRUCTURE PROCEDURES

机译:用于短期,半术和栅极结构程序所需的火栅电极

摘要

Gate structure for adapting the effective output work of a semiconductor unit, comprising:a gate dielectric on a channel zone of the semiconductor unit; andan electrode setting an output, having a first metal tride in direct contact with the gate dielectric, a molded material layer of an aluminium carbide and a second metal tride in direct contact with the molded material layer of the aluminium carbide, where the tailored material layer of aluminium carbide Al4C3 in combination with a nitride containing titanium and aluminium or a combination of both a carbide containing titanium and aluminium and a nitride containing both titanium and aluminium.
机译:用于调整半导体单元的有效输出工作的栅极结构,包括:在半导体单元的沟道区上的栅极电介质;和设置输出的电极,具有与栅极电介质直接接触的第一金属横接触,碳化铝的模制材料层和第二金属横线与铝碳化物的模制材料层直接接触,其中定制的材料层碳化铝Al4C3与含有钛和铝的氮化物的组合或含有钛和铝的碳化物和含有钛和铝的氮化物的组合。

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