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Joining device, joining system, joining method, and computer storage medium
Joining device, joining system, joining method, and computer storage medium
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机译：加入设备，加入系统，加入方法和计算机存储介质
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摘要
To properly perform position adjustment on a first holding unit for holding a first substrate and a second holding unit for holding a second substrate and properly perform joint processing between the substrates.SOLUTION: A joint device for joining substrates to each other includes a first holding unit for suctioning and holding a first substrate on a lower surface by vacuuming, a second holding unit which is provided below the first holding unit and suctions and holds a second substrate by vacuuming, a rotating mechanism for relatively rotating the first holding unit and the second holding unit, a moving mechanism for relatively moving the first holding unit and the second holding unit in a horizontal direction, three position measuring units which are provided to the first holding unit or the second holding unit rotated by the rotating mechanism and measures the position of the first holding unit or the second holding unit, and a controller for controlling the rotating mechanism and the moving mechanism based on measurement results by the three position measuring units.SELECTED DRAWING: Figure 7
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