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A chemical solution, a chemical solution container, a method for filling a chemical solution, and a storage method for a chemical solution
A chemical solution, a chemical solution container, a method for filling a chemical solution, and a storage method for a chemical solution
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机译:化学溶液,化学溶液容器,填充化学溶液的方法,以及用于化学溶液的储存方法
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摘要
An object of the present invention is to provide a chemical solution having excellent developability and excellent defect suppression performance. Another object of the present invention is to provide a chemical container, a method for transferring a chemical, and a method for storing a chemical. The chemical solution of the present invention is a chemical solution containing an organic solvent, a metal impurity, and an organic impurity, wherein the metal impurity contains a metal atom, and the total content of metal atoms in the chemical solution is 50 with respect to the total mass of the chemical solution. mass ppt or less, the total content of organic impurities in the chemical solution is 0.1 to 10000 mass ppm with respect to the total mass of the chemical solution, the organic impurities contain alcohol impurities, and the total content of the alcohol impurities relative to the total content of organic impurities Content mass ratio of content is 0.0001-0.5.
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