首页> 外国专利> A chemical solution, a chemical solution container, a method for filling a chemical solution, and a storage method for a chemical solution

A chemical solution, a chemical solution container, a method for filling a chemical solution, and a storage method for a chemical solution

机译:化学溶液,化学溶液容器,填充化学溶液的方法,以及用于化学溶液的储存方法

摘要

An object of the present invention is to provide a chemical solution having excellent developability and excellent defect suppression performance. Another object of the present invention is to provide a chemical container, a method for transferring a chemical, and a method for storing a chemical. The chemical solution of the present invention is a chemical solution containing an organic solvent, a metal impurity, and an organic impurity, wherein the metal impurity contains a metal atom, and the total content of metal atoms in the chemical solution is 50 with respect to the total mass of the chemical solution. mass ppt or less, the total content of organic impurities in the chemical solution is 0.1 to 10000 mass ppm with respect to the total mass of the chemical solution, the organic impurities contain alcohol impurities, and the total content of the alcohol impurities relative to the total content of organic impurities Content mass ratio of content is 0.0001-0.5.
机译:本发明的一个目的是提供一种具有优异的显影性和优异的缺陷抑制性能的化学溶液。本发明的另一个目的是提供一种化学品容器,一种用于转移化学物质的方法,以及用于储存化学物质的方法。本发明的化学溶液是含有有机溶剂,金属杂质和有机杂质的化学溶液,其中金属杂质含有金属原子,化学溶液中金属原子的总含量为50化学溶液的总质量。质谱或更小,化学溶液中有机杂质的总含量为0.1至10000质量ppm,相对于化学溶液的总质量,有机杂质含有醇杂质,以及醇杂质的总含量相对于醇杂质有机杂质含量质量比的总含量为0.0001-0.5。

著录项

  • 公开/公告号KR102263278B1

    专利类型

  • 公开/公告日2021-06-10

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR1020197008503

  • 申请日2017-08-29

  • 分类号G03F7/32;B65D88/06;

  • 国家 KR

  • 入库时间 2022-08-24 19:16:55

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