首页> 外国专利> RECONFIGURABLE TRANSMITARRAY ANTENNA WITH MONOLITHIC INTEGRATION OF ELEMENTARY CELLS

RECONFIGURABLE TRANSMITARRAY ANTENNA WITH MONOLITHIC INTEGRATION OF ELEMENTARY CELLS

机译:具有单片细胞的可重新配置的传输阵列天线的基本细胞

摘要

A structure including a first wafer, including first active components configured so as to introduce a phase shift; a first metal layer, formed on a first surface of the first wafer; a first interconnect structure, formed on a second surface of the first wafer, including first bias lines; a set of first planar antennas, formed on the first interconnect structure; a second wafer; a second metal layer, formed on a first surface of the second wafer; a set of second planar antennas, formed on a second surface of the second wafer; the first and second wafers being joined by way of the first and second metal layers such that the first and second planar antennas are aligned, the first and second metal layers forming a ground plane.
机译:包括第一晶片的结构,包括配置为引入相移的第一有源部件;形成在第一晶片的第一表面上的第一金属层;第一互连结构,形成在第一晶片的第二表面上,包括第一偏置线;一组第一平面天线,形成在第一互连结构上;第二个晶圆;在第二晶片的第一表面上形成的第二金属层;一组第二平面天线,形成在第二晶片的第二表面上;第一和第二晶片通过第一和第二金属层连接,使得第一和第二平面天线对齐,第一和第二金属层形成接地平面。

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