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Measuring Device for a Scanning Probe Microscope and Method for Scanning Probe Microscopic Examination of a Measurement Sample with a Scanning Probe Microscope
Measuring Device for a Scanning Probe Microscope and Method for Scanning Probe Microscopic Examination of a Measurement Sample with a Scanning Probe Microscope
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机译：用于扫描探针显微镜的测量装置及其用扫描探针显微镜扫描测量样品的探针微观检查
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摘要
The invention relates to a measuring device for a scanning probe microscope that comprises the following: a sample receptacle which is configured to receive a measurement sample to be examined; a measuring probe which is arranged on a probe holder and has a probe tip with which the measurement sample can be measured; a displacement device which is configured to move the measuring probe and the sample receptacle relative to each other, in order to measure the measurement sample, such that the measuring probe, in order to measure the measurement sample, executes a raster movement relative to said measurement sample in at least one spatial direction; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device that is configured to detect movement measurement signals for an actual movement of the measuring probe and/or of the sample receptacle that is executed during the relative movement between the measuring probe and the sample receptacle in order to measure the measurement sample, and to relay the movement measurement signals to the control device, the movement measurement signals indicating a first movement component in a first spatial direction that disrupts the raster movement and a second movement component in a second spatial direction that disrupts the raster movement, which second spatial direction extends transversely to the first spatial direction. The control device is configured to control the relative movement between the measuring probe and the sample receptacle in such a way that the displacement device is acted upon by the control device with compensating control signal components which cause a first countermovement which substantially compensates for the first disruptive movement component in the first spatial direction, and/or cause a second countermovement which substantially compensates for the second disruptive movement component in the second spatial direction. Furthermore, a scanning probe microscope comprising the measuring device and a method for scanning probe microscopic examination of a measurement sample by means of a scanning probe microscope are provided.
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