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Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films
Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films
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机译：可拆卸的不透明涂层，用于精确的光学形貌测量在透明薄膜的顶面上测量
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摘要
A method of using removable opaque coating for accurate optical topography measurements on top surfaces of transparent films includes: depositing a highly reflective coating onto a top surface of a wafer, measuring topography on the highly reflective coating, and removing the highly reflective coating from the wafer. The highly reflective coating includes an organic material. The highly reflective coating comprises a refractive index value between one and two. The highly reflective coating comprises a complex wavelength greater than one at six-hundred and thirty-five nanometers. The highly reflective coating reflects at least twenty percent of incident light. The highly reflective coating when deposited maintains an underlayer pattern topography at a resolution of forty by forty micrometers. The highly reflective coating does not cause destructive stress to the wafer.
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