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Module technology, process technology equipment, and method for controlling process technology equipment
Module technology, process technology equipment, and method for controlling process technology equipment
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机译：模块技术，过程技术设备和控制过程技术设备的方法
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摘要
PROBLEM TO BE SOLVED: To provide a module for a process technology facility and a method for controlling the process technology facility.SOLUTION: A module 1 for a process technology facility 90 comprises: process technology hardware 10 for implementing a process technology sub-process; and a controller 20 for controlling the process technology hardware 10 within a local range. The controller 20 controls the process technology hardware 10 independently, and brings it into some defined particular states. The module 1 further comprises an external interface 22 of the controller 10. The external interface 22 can receive some defined commands, and the commands accords with the defined particular states of the process technology hardware 10. Furthermore, the present invention claims a method for controlling a process technology facility 90 composed of a plurality of modules 1.SELECTED DRAWING: Figure 1
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