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SHAPE CHARACTERISTIC VALUE ESTIMATION APPARATUS, SHAPE CHARACTERISTIC VALUE ESTIMATION METHOD, AND STORAGE MEDIUM
SHAPE CHARACTERISTIC VALUE ESTIMATION APPARATUS, SHAPE CHARACTERISTIC VALUE ESTIMATION METHOD, AND STORAGE MEDIUM
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机译：形状特征值估计装置，形状特征值估计方法和存储介质
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摘要
The present invention estimates the characteristic value related to the shape of the film formed on the target substrate with higher precision. The shape characteristic value estimating apparatus includes a post-processed image acquisition unit for acquiring a post-processed image including image information on the surface of the substrate on which the target film is formed, and information about the color of the surface of the substrate included in the post-processed image and to the substrate. an estimator for estimating the shape characteristic value by applying an estimation model for estimating the shape characteristic value of the target film related to the correlation of the shape characteristic values of the formed target film to the image after processing; and the shape of the target film by the estimator Information on the difference between the characteristic value estimation result and the shape characteristic value of the target film obtained without using an estimation model, and the color of the underlying substrate surface included in the underlying image, which is image information about the surface of the underlying substrate before the target film is formed It has a lower extremity influence model creating unit that creates a lower extremity influence model, which is a model relating to the correlation of , and an estimation result correcting unit which corrects an estimation result of the shape characteristic value of the target film by the estimator based on the lower extremity influence model.
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