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SURFACE DEFECT DETECTION DEVICE, SURFACE DEFECT DETECTION METHOD AND PROGRAM, AND SURFACE DEFECT DETECTION SYSTEM
SURFACE DEFECT DETECTION DEVICE, SURFACE DEFECT DETECTION METHOD AND PROGRAM, AND SURFACE DEFECT DETECTION SYSTEM
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机译：表面缺陷检测装置，表面缺陷检测方法和程序，以及表面缺陷检测系统
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摘要
According to the present invention, an illumination unit 20 irradiates a target object OB with illumination light of which a portion is shielded. A polarization imaging unit 30 images the target object irradiated with the illumination light from the illumination unit 20 and generates a polarization image. A polarization information acquisition unit 41 of a surface defect detection unit 40 acquires polarization information, for example, the degree of polarization, on a pixel-by-pixel basis on the basis of the polarization image generated in the polarization imaging unit 30. A defect detection processing unit 42 detects a defect on an object surface of the target object OB on the basis of the polarization information acquired by the polarization information acquisition unit 41. Even when a luminance difference is small in the target object OB, the defect on the object surface can be stably detected on the basis of the polarization image.
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