首页>
外国专利>
Obtaining a mask using a cost function gradient from a Jacobian matrix generated from a perturbation look-up table
Obtaining a mask using a cost function gradient from a Jacobian matrix generated from a perturbation look-up table
展开▼
机译：使用从扰动查找表生成的雅各比矩阵中的成本函数渐变获得掩码
展开▼
页面导航
摘要
著录项
相似文献
摘要
Aspects described herein relate to obtaining a mask pattern using a cost function gradient (CFG) generated from a Jacobian matrix generated from a perturbation look-up table (PLT). In an example method, a PLT is populated (108). Each table entry of the PLT is based on a respective perturbed intensity signal. The respective perturbed intensity signal is based on a simulated signal received at an image surface using a mask pattern having a perturbed element of the mask pattern. The mask pattern is for a design of an integrated circuit. A matrix is populated (110) using the PLT and a target intensity signal. The target intensity signal is based on a signal received at the image surface to form target features at the image surface. A CFG is defined (112) based on the matrix. An analysis is performed (114) on the mask pattern based on the CFG.
展开▼
