首页> 外国专利> Interchangeable and / or folded edge ring assemblies for plasma sheath alignment incorporating edge ring positioning and centering mechanisms

Interchangeable and / or folded edge ring assemblies for plasma sheath alignment incorporating edge ring positioning and centering mechanisms

机译:用于等离子体鞘对准的可互换和/或折叠边缘环组件结合边缘环定位和定心机构

摘要

Problem to be solved: to provide an interchangeable and / or folded edge ring assembly for plasma sheath adjustment incorporating edge ring positioning and centering mechanisms.The edge ring assembly 302 for the substrate support 304 includes an upper edge ring 308 and one or more lift pin receiving elements 322.The upper edge ring 308 has a size and shape surrounding the upper portion of the substrate support 304.Upper edge ring 308 defines an upper surface, a bottom surface, a radial inner surface, and a radial outer surface.One or more lift pin receiving elements 322 are disposed along the bottom surface of the upper edge ring 308 and have a size and shape to receive each upper portion 332 of the three or more lift pins to provide kinematic coupling with the top portion 332.Fig. 3 (a)
机译:要解决的问题:提供一种可互换和/或折叠边缘环形组件,用于包括边缘环定位和定心机构的等离子体护套调节。用于基板支撑件304的边缘环形组件302包括上边缘环308和一个或多个提升销接收元件322.上边缘环308具有围绕基板支撑件304.Upper边缘环308的上部的尺寸和形状限定上表面,底表面,径向内表面和径向外表面。一个或更多个提升销接收元件322沿着上边缘环308的底表面设置,并且具有尺寸和形状以接收每个鞋面三个或多个升降销的部分332,以提供与顶部332.fig的运动耦合。 3(a)

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