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3 OPTICAL COUPLING MODULE OF SILICON PHOTONICS CHIP USING 3D NANOPRINTING AND MANUFACTURING METHOD THEREOF
3 OPTICAL COUPLING MODULE OF SILICON PHOTONICS CHIP USING 3D NANOPRINTING AND MANUFACTURING METHOD THEREOF
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机译:3使用3D纳米印刷和制造方法的硅光子芯片的3光学耦合模块
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摘要
The present invention relates to an optical coupling module of a silicon photonics chip using 3D nanoprinting and a method for manufacturing the same. The optical coupling module of the silicon photonics chip of the present invention uses 3D nano-printing technology using a laser to manufacture an optical fiber connection member made of a photosensitive polymer material and insert an optical fiber into the connection member to directly connect the silicon photonics chip and an external optical fiber. By optical coupling, the transmission efficiency is high without loss of the optical signal emitted from the optical fiber, and thus it can be applied to the optical communication field and the device field.
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