Method for producing single crystal film of AlN material and substrate for epitaxial growth of single crystal film of AlN material

• 1. AlN材料单晶层的制造方法和外延生长AlN材料单晶膜的衬底 [P] . 中国专利： CN111902571A . 2020-11-06
• 2. LNO材料单晶层的制造方法和外延生长LNO材料单晶层的衬底 [P] . 中国专利： CN111902572A . 2020-11-06
• 3. METHOD FOR PRODUCING A SINGLE-CRYSTAL FILM OF ALN MATERIAL AND SUBSTRATE FOR THE EPITAXIAL GROWTH OF A SINGLE-CRYSTAL FILM OF ALN MATERIAL [P] . 世界知识产权组织专利： WO2019186266A2 . 2019-10-03

  机译： 制备单晶Aln材料膜和用于单晶Aln材料膜生长的基质的方法

• 4. METHOD OF MANUFACTURING AlN SINGLE CRYSTAL AND BASE MATERIAL FOR GROWING AlN SINGLE CRYSTAL [P] . 日本专利： JP2016020286A . 2016-02-04

  机译： 制造AlN单晶的方法和用于生长AlN单晶的基础材料

• 5. SURFACE PROCESSING METHOD OF AlN CRYSTAL, AlN CRYSTAL SUBSTRATE, THE AlN CRYSTAL SUBSTRATE WITH EPITAXIAL LAYER, AND SEMICONDUCTOR DEVICE [P] . 日本专利： JP2006060074A . 2006-03-02

  机译： AlN晶体，AlN晶体基质，具有磊晶层的AlN晶体基质和半导体装置的表面处理方法

• 1. Tunable In-Plane Anisotropy in Amorphous Sm Co Films Grown on(011)-Oriented Single-Crystal Substrates [J] . Wenhui Liang, Houbo Zhou, Jiefu Xiong, 工程（英文） . 2020,第002期
• 2. Growth and Characterization of AlN and AlGaN Epitaxial Films On AlN Single Crystal Substrates [C] . R. Dalmau, B. Moody, R. Schlesser, Symposium on State-of-the-Art Program on Compound Semiconductors . 2010
• 3. Al-rich AlGaN and AlN Growth on Bulk AlN Single Crystal Substrates [D] . Bryan, Isaac S. 2015
• 4. Deformation of Single Crystals Polycrystalline Materials and Thin Films: A Review [O] . Guijun Yang, Soo-Jin Park 2019
• 5. Nanoporous films for epitaxial growth of single crystal semiconductor materials : final LDRD report. [O] . Rowen, Adam M., Koleske, Daniel David, Fan, Hongyou, 2007
• 6. Nanoporous Films for Epitaxial Growth of Single Crystal Semiconductor Materials: Final LDRD Report [R] . Burckel, D. B., Fan, H., Koleske, D. D., 2007

• 1. Influence of substrate metals on the crystal growth of AlN films [J] . Juan Xiong Hao-shuang Gu Kuan Hu Ming-zhe Hu . 矿物冶金与材料学报：英文版 . 2010,第1期
• 2. Comparison of Different Crucible Materials for the Growth of AlN Crystals [J] . . 结构化学 . 2007,第010期
• 3. Epitaxial growth of CsPbBr_(3)/PbS single-crystal film heterostructures for photodetection [J] . Yifan Wang ,Xuanze Li ,Pei Liu . 半导体学报:英文版 . 2021,第11期
• 4. Some Properties of Group-III Nitride Thin Films Directly Grown on Non-Single-Crystalline Substrates by Using a Molecular Beam Epitaxy Apparatus [J] . Yuichi Sato ,Shota Ishizaki ,Yoshifumi Murakami . 现代物理（英文） . 2015,第9期
• 5. 纳米多层膜中立方AlN外延生长的HRTEM观察 [C] . 田家万 ,劳技军 ,虞晓江 . 第十二届全国电子显微学会议 . 2002
• 6. Al/AlN纳米多层膜及氮化铜光记录薄膜材料的制备与性能研究 [A] . 吴志国 . 2006