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Packaging method and associated packaging structure

机译:包装方法和相关包装结构

摘要

The present disclosure provides a packaging method, including: providing a first semiconductor substrate; forming a bonding region on the first semiconductor substrate, wherein the bonding region of the first semiconductor substrate includes a first bonding metal layer and a second bonding metal layer; providing a second semiconductor substrate having a bonding region, wherein the bonding region of the second semiconductor substrate includes a third bonding layer; and bonding the first semiconductor substrate to the second semiconductor substrate by bringing the bonding region of the first semiconductor substrate in contact with the bonding region of the second semiconductor substrate; wherein the first and third bonding metal layers include copper (Cu), and the second bonding metal layer includes Tin (Sn). An associated packaging structure is also disclosed.
机译:本公开提供一种包装方法,包括:提供第一半导体衬底;在第一半导体衬底上形成键合区域,其中第一半导体基板的键合区域包括第一键合金属层和第二键合金属层;提供具有粘合区域的第二半导体衬底,其中第二半导体基板的键合区域包括第三粘合层;并通过使第一半导体衬底的接合区域与第二半导体衬底的接合区域接触来使第一半导体衬底粘合到第二半导体衬底;其中第一和第三键合金属层包括铜(Cu),第二键合金属层包括锡(Sn)。还公开了一种相关的包装结构。

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