Displacement detector, surface texture measurement instrument, and roundness measurement instrument
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机译:位移探测器,表面纹理测量仪器和圆度测量仪器
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摘要
Provided are a displacement detector, surface texture measurement instrument, and roundness measurement instrument that make it possible to measure displacement in a plurality of directions, have simple structures, and make highly accurate measurement possible. A displacement measurement instrument (20) comprises: a detector body (30); a roughly L-shaped stylus (40) having a contactor (44) for touching a surface under measurement of an object (W) under measurement; a stylus holding part (33) that is provided in the detector body (30) and holds the stylus (40) such that the same can pivot in a pivoting plane including a first direction and second direction that are orthogonal to each other; and a displacement detection unit that is provided in the detector body (30) and detects displacement of the contactor (44) accompanying contact between the contactor (44) and the surface under measurement.
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