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HIGH-EFFICIENCY END-FIRE 3D OPTICAL PHASED ARRAY BASED ON MULTI-LAYER PLATFORM
HIGH-EFFICIENCY END-FIRE 3D OPTICAL PHASED ARRAY BASED ON MULTI-LAYER PLATFORM
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机译：基于多层平台的高效端火3D光相控阵
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摘要
Beam steering device such as optical phased array (OPA) is a key component in applications of solid-state LIDAR and wireless communication. The traditional single- layer OPA results in a significant energy loss due to the substrate leakage caused by the downward coupling from the grating coupler structure. In the present disclosure, we have investigated a structure based on multi-layers Si3N4/SiO2 platform that can form a 3D OPA to emit the light from the edge of the device with a high efficiency, a 2D converged out-coupling beam will be end-fired to the air. The high efficiency and wide horizontal beam steering are demonstrated numerically, the influence of vertical crosstalk, the delay length, number of waveguide layers, and the fabrication feasibility are also discussed.
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