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STRUCTURE OF INFRARED BAND-PASS FILTER AND INFRARED BAND-PASS FILTER USING THE STRUCTURE
STRUCTURE OF INFRARED BAND-PASS FILTER AND INFRARED BAND-PASS FILTER USING THE STRUCTURE
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机译：使用该结构的红外带式过滤器和红外带通滤波器的结构
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摘要
STRUCTURE OF INFRARED BAND-PASS FILTER AND INFRARED BAND-PASS FILTER USING THE STRUCTURE An infrared band-pass filter structure (20) is formed by alternately stacking a plurality of layers of hydride. aluminum and silicon (21) and a plurality of low refractive index layers (22). The plurality of low refractive index layers (22) include oxide. The infrared bandpass filter structure (20) has a bandwidth that at least partially overlaps the wavelength range of 800nm-1600nm. The bandwidth has a central wavelength, and the central wavelength has an offset amplitude which is less than 11nm when an angle of incidence changes from 0 ° to 30 °. The invention further relates to an infrared band-pass filter which comprises the infrared band-pass filter structure (20) formed on a first side surface of a substrate (10) and an anti-reflective layer (30) formed on a substrate (10). second side surface of the substrate (10) which is at a side opposite to the first side surface. Figure to be published with the abstract: Figure 1
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