首页> 外国专利> SPACER WAFER FOR PRODUCING AN ELECTRO-OPTICAL TRANSDUCER COMPONENT, SPACER, METHOD FOR PRODUCING SUCH A SPACER WAFER, AND ELECTRO-OPTICAL TRANSDUCER COMPONENT COMPRISING SUCH A SPACER

SPACER WAFER FOR PRODUCING AN ELECTRO-OPTICAL TRANSDUCER COMPONENT, SPACER, METHOD FOR PRODUCING SUCH A SPACER WAFER, AND ELECTRO-OPTICAL TRANSDUCER COMPONENT COMPRISING SUCH A SPACER

机译:用于制造电光换能器部件,间隔物,制造这种间隔晶片的方法的间隔物晶片,以及包括这种间隔物的电光换能器部件

摘要

The invention provides a spacer wafer (1) for producing spacers (2) for housing electro-optical transducers (3) by removing portions (4) from the spacer wafer (1). The spacer wafer (1) comprises a transparent glass panel (10) which has a large number of openings (5) which are arranged distributed in a grid and are separated from one another, so that the individual spacers (2) can be obtained by removing portions (4) of the glass panel (10) along separating lines (7) between the openings (5), wherein the openings (5) have side walls (50) with a microstructuring (9) having a degree of roughness, wherein the mean roughness value Ra is less than 0.5 µm given a measurement section of 500 µm.
机译:本发明提供了一种间隔晶片(1),用于通过从间隔晶片(1)中除去部分(4)来制造用于壳体电光换能器(3)的间隔物(2)。 间隔物晶片(1)包括透明玻璃板(10),该透明玻璃板(10)具有大量的开口(5),所述开口(5)被分布在栅格中并彼此分开,使得各个间隔物(2)可以通过 沿着开口(5)之间的分离线(7)去除玻璃板(10)的部分(4),其中,所述开口(5)具有侧壁(50),所述侧壁(50)具有具有粗糙度的微观结构(9),其中 给定500μm的测量部分的平均粗糙度值Ra小于0.5μm。

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