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Standard water generating device, system using standard water generator, method for detecting abnormality of standard moisture and computer program for detecting abnormality

机译:标准发电机,使用标准水发生器的系统,检测标准湿度异常的方法和检测异常的方法

摘要

PROBLEM TO BE SOLVED: To provide a standard moisture generator with a flow controller for controlling the flow of gas, and a dryer which is connected to the flow controller and absorbs water molecules in the gas to generate a dry gas having background moisture. A moisture cell connected to a dryer to add target moisture to the drying gas and a delaying means connected to the moisture chamber to allow the drying gas to pass through with a delay time depending on the concentration of background moisture in the drying gas. ..
机译:要解决的问题:提供一种具有用于控制气体流动的流量控制器的标准湿气发生器,以及连接到流量控制器的干燥器,并吸收气体中的水分子,以产生具有背景水分的干燥气体。 连接到干燥器的水分细胞,以向干燥气体添加靶水分和连接到水分室的延迟装置,以允许干燥气体通过延迟时间来通过干燥气体中的背景水分的浓度。 ..

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