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- HALOGEN FREE SYNTHESES OF AMINOSILANES BY CATALYTIC DEHYDROGENATIVE COUPLING
- HALOGEN FREE SYNTHESES OF AMINOSILANES BY CATALYTIC DEHYDROGENATIVE COUPLING
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机译：- 通过催化脱氢偶联的氨基硅烷的无卤合成
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摘要
Compounds of Si-X and Ge-X compounds (X = N, P, As and Sb) via dehydrogenation coupling between the corresponding unsubstituted silanes and amines (including ammonia) or phosphines catalyzed by metallic catalysts and methods of making the same. This novel approach is based on the catalytic dehydrogenation coupling of Si-H and X-H moieties to form Si-X containing compounds and hydrogen gas (X = N, P, As and Sb). The process can be catalyzed by transition metal heterogeneous catalysts such as Ru(0)/C, Pd(O)/MgO and transition metal organometallic complexes acting as homogeneous catalysts. The -Si-X product prepared by dehydrogenation coupling is essentially halogen-free. The compounds may be useful for deposition of thin films by chemical vapor deposition of Si-containing films or by atomic layer deposition.
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