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- CLUSTER MASS FLOW DEVICES AND MULTI-LINE MASS FLOW DEVICES INCORPORATING THE SAME
- CLUSTER MASS FLOW DEVICES AND MULTI-LINE MASS FLOW DEVICES INCORPORATING THE SAME
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机译:- 包含相同的簇质量流量装置和多线质量流量装置
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摘要
A multi-line mass flow device configured for controlled delivery of two or more fluids into a process chamber is provided. The multi-line mass flow device includes a cluster mass flow control manifold and a multi-inlet manifold. The cluster mass flow control manifold includes a controller, a gas manifold mounting block, and two or more gas flow control stations. The multi-inlet manifold includes a multi-inlet mounting block and two or more isolation valves mounted on the multi-inlet mounting block.
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